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Comb drive
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#	Item
1	2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) Wollongong, Australia, July 9-12, 2013 Micro-Force Sensor by Active Control of a Comb-Drive Abdenbi Mohand Ousaid, Sinan Haliyo, St´epha Add to Reading List Source URL: www.cim.mcgill.ca Language: English - Date: 2013-11-08 17:21:27 Transducers Condensed matter physics Microtechnology Mechanical engineering Energy harvesting Piezoelectricity Atomic force microscopy Photodiode Pressure sensor Physics Electromagnetism Technology
2	This article has been accepted for inclusion in a future issue of this journal. Content is final as presented, with the exception of pagination. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 1 An Electrostatic Zigzag Transm Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2007-01-22 07:55:51 Microelectromechanical systems Comb drive Zigzag Microlens Shutter Microtechnology Materials science Technology
3	HIGHLY SPACE-EFFICIENT ELECTROSTATIC ZIGZAG TRANSMISSIVE MICRO-OPTIC SWITCHES FOR AN INTEGRATED MEMS OPTICAL DISPLAY SYSTEM Kerwin Wang1, Karl F. Böhringer1, Mike Sinclair2, and Gary Starkweather2 of Washington, Seattle Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-08-07 23:33:00 Microelectromechanical systems Deformable mirror Microlens Micro-Opto-Electro-Mechanical Systems Comb drive Shutter Grating light valve Time-multiplexed optical shutter Microtechnology Materials science Technology
4	LOW VOLTAGE AND PULL-IN STATE ADJUSTABLE DUAL-SERVO-SCANNING-MIRROR Kerwin Wang1, Mike Sinclair2, Karl F. Böhringer1 1 University of Washington, 2Microsoft Research Seattle, WA 98195 Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-02-07 03:34:26 Technology Energy Microelectromechanical systems Comb drive Torsion spring Microscanner Deformable mirror Microtechnology Actuators Materials science
5	DESIGN, FABRICATION, AND CHARACTERIZATION OF SINGLE CRYSTAL SILICON LATCHING SNAP FASTENERS FOR MICRO ASSEMBLY Rama Prasad Sibley School of Mechanical and Aerospace Engineering Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-05 01:35:00 Materials science Construction Metalworking Mechanical engineering Latch Screw Snap fastener Microelectromechanical systems Comb drive Technology Microtechnology Fasteners
6	MEMS Control Moment Gyroscope Design and Wafer-Based Spacecraft Chassis Study a a Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-05 01:33:00 Materials science Spacecraft design Gyroscopes Actuators Microelectromechanical systems Transducers Control moment gyroscope Attitude control Comb drive Spaceflight Technology Microtechnology
7	LOW -VOLTAGE LARGE ANGULAR DISPLACEMENT ELECTROSTATIC SCANNING MICROMIRROR USING FLOATING SLIDER MECHANISM 1 1 Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-11-07 11:50:11 Technology Microelectromechanical systems Piezoelectricity Bimorph Cantilever Comb drive Micro-Opto-Electro-Mechanical Systems Torsion spring Resonance Microtechnology Materials science Physics
8	POST-CMOS PROCESSING FOR HIGH-ASPECT-RATIO INTEGRATED SILICON MICROSTRUCTURES Huikai Xie, Lars Erdmann, Xu Zhu, Kaigham J. Gabriel† and Gary K. Fedder† Department of Electrical and Computer Engineering and † Add to Reading List Source URL: www.ece.cmu.edu Language: English - Date: 2005-06-13 11:06:39 Semiconductor device fabrication Nanotechnology Etching Microelectromechanical systems Transducers Surface micromachining Deep reactive-ion etching Comb drive Advanced Silicon Etch Microtechnology Materials science Technology
9	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 2, APRIL[removed]Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures Add to Reading List Source URL: www.ece.cmu.edu Language: English - Date: 2005-06-13 10:40:36 Microelectromechanical systems Surface micromachining Etching Comb drive Microfabrication Deep reactive-ion etching Advanced Silicon Etch CMOS Micromachinery Microtechnology Materials science Technology
10	Dynamic Modeling and Input Shaping for MEMS Dan O. Popa†, John T. Wen†, Harry Stephanou†, George Skidmore‡, Matt Ellis‡ † Center for Automation Technologies, Rensselaer Polytechnic Institute, Troy, New York 1 Add to Reading List Source URL: www.nsti.org Language: English - Date: 2008-11-17 19:32:17 Science Electromagnetism Microelectromechanical systems Comb drive Control theory MUMPS State space Heat equation RF MEMS Microtechnology Actuators Technology

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